01
Drawing & sample review
Engineering evaluation based on a customer drawing, reference sample or agreed specification.
WWONIKWuxi · Lianyungang
Enquire
Open navigation
Custom components for semiconductor process equipment
Semiconductor components.
Made to your drawing.
Quartz, silicon, ceramic and SiC components developed around your drawing, equipment conditions and acceptance criteria — from feasibility review to customer qualification.
Multi-material
Quartz, silicon, ceramic and SiC development options
Drawing-led
Evaluation against customer-controlled technical inputs
Qualification
DFM, prototype and first-article planning
Lifecycle
New parts, refurbishment and spare-part support
Why WONIK
A direct route from part need to customer qualification.
WONIK Semicon combines component engineering, integrated production and lifecycle services to help fabs and equipment partners evaluate alternative sources for critical hard-brittle components.
Quartz · 石英Silicon · 硅Ceramic · 陶瓷SiC · 碳化硅
02
Integrated manufacturing
Cold machining, flame working, cleaning and inspection managed through one production flow.
03
Defined quality route
Material, inspection, cleaning and packaging criteria aligned with the agreed acceptance specification.
04
Lifecycle support
Repair, refurbishment and buffer-stock programs designed to reduce cost and unplanned downtime.
Explore component categories. Search and filter by material, process or size in the product directory.
Batch handling
Wafer Carriers
Explore category
Process environment
Process Tubes & Chamber Parts
Explore category
Chemistry and flow
Wet & Flow-Control Components
Explore category
Equipment support
Handling & Thermal Support
Explore category
Repair and spares
Lifecycle Services
Explore categoryNeed a non-standard component?
Send a drawing or sample for feasibility review and a controlled development plan.
Semiconductor applications
Start with the process, then define the part.
These are representative application directions—not statements of compatibility with a specific tool. Final suitability depends on the drawing, material, process conditions and customer qualification.
01Review required
Thermal processing
Oxidation · Diffusion · Annealing
Quartz or SiC wafer boats, process tubes, gas-delivery and thermal-support components.
Confirm before quotation
Wafer size, furnace type, temperature profile, atmosphere and cleanliness criteria.
02Review required
Deposition
CVD · LPCVD
Process tubes, chambers, injectors, baffles, carriers and custom quartz assemblies.
Confirm before quotation
Film process, gases, pressure, temperature, interface and cleaning specification.
03Review required
Wet processing
Cleaning · Wet etch · Resist strip
Quartz tanks, overflow and circulation vessels, flow-control and support components.
Confirm before quotation
Chemistry, concentration, temperature, capacity, circulation and leak requirements.
04Review required
Dry etching
Plasma etch · Chamber support
Quartz or silicon rings, windows, baffles, shields and ceramic positioning parts.
Confirm before quotation
Chamber, plasma chemistry, wafer size, material grade and qualification standard.
05Review required
Epitaxy
Application review
Quartz chambers, gas-delivery, flow-control, window and carrier components.
Confirm before quotation
Material system, equipment, gases, temperature, coatings and particle criteria.
06Review required
Equipment lifecycle
Repair · Refurbishment · Spare support
Feasibility review for serviceable quartz parts and agreed spare-part programs.
Confirm before quotation
Part condition, drawing revision, failure mode, acceptance and demand profile.
10,000+ m²Production facility
67Machining assets
Facility and equipment figures: 2026 company introduction. Project capabilities are subject to technical review.
Quality infrastructure
Qualification starts with the right criteria.
From material documentation and dimensional inspection to cleaning and final packaging, the route is defined around the part, application and agreed acceptance criteria.
Material documentationGrade, batch and CoA requirements aligned before production
Dimensional inspectionCritical dimensions, datums, surface finish and methods agreed in advance
Cleaning & packagingHandling and packaging route defined by the product specification
FAIfirst-article inspection planning
CoAwhen agreed by specification
WONIK · Our factory
Inside WONIK manufacturing
WONIK Semicon Co., Ltd. has companies in Wuxi and Lianyungang. Our factory brings together CNC machining, quartz flame working, dimensional inspection and cleaning to support semiconductor component production.
CNC machining
Machining centres support cutting, grinding and polishing of quartz components.
Quartz flame working
Glass lathes and flame-working stations support forming and welding of quartz parts.
Dimensional inspection
Vision measurement equipment supports dimensional checks against component drawings.
Cleaning & packing area
Automated cleaning equipment supports the cleaning stage before final packing.
Factory photographs: WONIK company introduction, 2026, pages 5–8. Processing routes, cleanliness requirements and acceptance criteria are confirmed for each project.
A clear qualification path
From reference part to repeatable supply.
A controlled route from technical inputs through engineering, prototype production and qualification.
Define
Sample or drawing, material, equipment and process requirements.
Engineer
Measure, model and agree critical dimensions and acceptance criteria.
Build
Produce a prototype through the agreed manufacturing route.
Qualify & supply
Inspect, clean and package for customer evaluation, then plan repeat supply.
Start a technical conversation
Bring us the part your process depends on.
For a faster feasibility review, prepare the equipment family, part drawing or sample, material grade, critical tolerances, cleaning requirement and estimated annual demand.
WONIK Semicon Co., Ltd. · Wuxi / Lianyungang. Choose the contact channel for your business region.