Product directory

Find the component for your process.

Browse by equipment function, then open a product-family page to review candidate processes, typical part names and the technical inputs needed for an engineering evaluation.

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12 of 12 product families match

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Wafer carriersFused quartz

Quartz Wafer Boats

Drawing-based horizontal and custom carriers with slot geometry developed around the substrate and loading method.

Potential process fit: Thermal processing · Deposition
Equipment area: Wafer handling · Furnace

Identification & RFQ guide

Common part names

horizontal boat · open boat · slotted carrier · substrate boat

Confirm before quotation

Wafer or substrate size
Slot count, pitch and orientation
Furnace type and temperature profile

View details Select for RFQ

Representative WONIK vertical quartz carrier structure

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Wafer carriersFused quartz

Vertical Quartz Wafer Boats

Vertical batch-carrier structures evaluated for coaxiality, accumulated slot error and wafer support geometry.

Potential process fit: Thermal processing · Deposition
Equipment area: Wafer handling · Furnace

Identification & RFQ guide

Common part names

vertical boat · batch carrier · cylindrical carrier

Confirm before quotation

Wafer size and batch capacity
Slot datum and cumulative tolerance
Loading interface and furnace model

View details Select for RFQ

Representative WONIK silicon carbide wafer boat

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Wafer carriersSilicon carbide

SiC Wafer Boats

Custom high-temperature carrier development based on confirmed SiC grade, geometry and qualification criteria.

Potential process fit: Thermal processing · Deposition
Equipment area: Wafer handling · Furnace

Identification & RFQ guide

Common part names

SiC boat · high-temperature carrier · slotted carrier

Confirm before quotation

SiC grade or coating system
Wafer size and slot specification
Thermal cycle and acceptance criteria

View details Select for RFQ

Representative WONIK quartz process tube

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Process tubes & chambersFused quartz

Quartz Process Tubes

Inner, outer and assembled quartz tubes with interfaces, branches and sealing surfaces controlled to the drawing.

Potential process fit: Thermal processing · Deposition · Epitaxy
Equipment area: Furnace · Process chamber

Identification & RFQ guide

Common part names

inner tube · outer tube · liner · process chamber · furnace tube

Confirm before quotation

Inner and outer diameter with wall thickness
Ports, flanges and sealing interfaces
Pressure, gases and temperature

View details Select for RFQ

Representative WONIK quartz wet process tank

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Wet-process vesselsFused quartz

Quartz Wet Process Tanks

Custom tanks and vessels reviewed around chemistry, circulation, capacity, thermal load and leak criteria.

Potential process fit: Wet processing
Equipment area: Wet bench

Identification & RFQ guide

Common part names

process tank · overflow tank · circulation vessel · heated bath

Confirm before quotation

Chemistry and concentration
Working temperature and capacity
Overflow, circulation and leak requirements

View details Select for RFQ

Representative WONIK quartz gas-delivery component

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Gas-path componentsFused quartz

Quartz Gas Delivery & Injectors

Custom tubes, injectors and distribution assemblies developed around port geometry and gas-flow requirements.

Potential process fit: Thermal processing · Deposition · Epitaxy
Equipment area: Gas path · Furnace · Process chamber

Identification & RFQ guide

Common part names

injector · gas tube · distribution tube · nozzle · manifold assembly

Confirm before quotation

Gas chemistry and flow direction
Port layout and mating interface
Pressure, temperature and leak criteria

View details Select for RFQ

Representative WONIK flow-control and baffle component

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Flow-control partsMaterial to confirm

Baffles & Flow Diffuser Assemblies

Plates, rings and assemblies evaluated for hole pattern, effective flow area, flatness and mounting datum.

Potential process fit: Thermal processing · Deposition · Dry etch & chamber
Equipment area: Furnace · Process chamber · Gas path

Identification & RFQ guide

Common part names

baffle · diffuser plate · perforated plate · shield · flow-control ring

Confirm before quotation

Material and surface requirement
Hole pattern and effective flow area
Module position and mounting datum

View details Select for RFQ

Representative precision quartz component; final window geometry is drawing-specific

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Windows & optical candidatesFused quartz

Quartz Viewing Windows

Chamber viewing and optical-monitoring candidates; wavelength, sealing edge and optical requirements must be confirmed.

Potential process fit: Deposition · Dry etch & chamber · Epitaxy
Equipment area: Process chamber

Identification & RFQ guide

Common part names

viewing window · viewport · optical window · monitoring window

Confirm before quotation

Working wavelength and clear aperture
Flatness, parallelism and finish
Seal geometry and chamber position

View details Select for RFQ

Representative WONIK precision quartz tube and handling component

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Handling & protectionFused quartz

Quartz Handling Tools & Sleeves

Handling rods, forks, cantilever tubes and protection sleeves made to the load, reach and interface definition.

Potential process fit: Equipment support
Equipment area: Wafer handling · Furnace

Identification & RFQ guide

Common part names

boat rod · handling fork · cantilever tube · protective sleeve · operation tool

Confirm before quotation

Handled component and load
Reach, interface and motion envelope
Contact surfaces and cleanliness

View details Select for RFQ

Representative WONIK quartz support and carrier structure

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Supports & fixturesFused quartz

Quartz Supports & Structural Fixtures

Drawing-based support plates, brackets, pins and carrier structures with critical datums agreed before manufacture.

Potential process fit: Thermal processing · Deposition · Wet processing
Equipment area: Furnace · Process chamber · Wet bench

Identification & RFQ guide

Common part names

support plate · bracket · positioning pin · carrier frame · structural assembly

Confirm before quotation

Load path and mounting points
Critical datums and tolerances
Temperature, chemistry and cleaning route

View details Select for RFQ

Representative WONIK thermal-zone support component

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Thermal-zone componentsMaterial to confirm

Thermal Field & Insulation Assemblies

Thermal-zone and insulation candidates reviewed only after material, temperature profile and assembly position are confirmed.

Potential process fit: Thermal processing
Equipment area: Furnace

Identification & RFQ guide

Common part names

thermal barrier · heat-field support · insulation assembly · stacked shield

Confirm before quotation

Material or coating system
Temperature profile and atmosphere
Stack-up, support and installation position

View details Select for RFQ

Representative WONIK quartz process tube for service evaluation

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Lifecycle serviceFused quartz

Quartz Tube Repair & Refurbishment

Feasibility review for serviceable quartz tubes and assemblies after contamination, crystallization and damage assessment.

Potential process fit: Equipment support
Equipment area: Service & refurbishment

Identification & RFQ guide

Common part names

repair · refurbishment · tube restoration · spare support

Confirm before quotation

Part condition and contamination history
Crack, crystallization and wall-thickness data
Original drawing and acceptance criteria

View details Select for RFQ

Product names and process directions identify candidate families only. Material grade, dimensions, tool compatibility and process suitability are confirmed against the customer drawing, sample and qualification plan.

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Browse by category

Batch handling

Wafer Carriers

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Process environment

Process Tubes & Chamber Parts

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Chemistry and flow

Wet & Flow-Control Components

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Equipment support

Handling & Thermal Support

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Repair and spares

Lifecycle Services

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