Wafer carriers
Quartz Wafer Boats
Drawing-based horizontal and custom carriers with slot geometry developed around the substrate and loading method.
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Batch handling
Wafer Carriers
Quartz and SiC carrier families organized around wafer size, slot geometry, furnace orientation and the customer qualification route.
Selection guide
Start with wafer size, batch capacity, furnace orientation and slot definition.
Use the equipment position and process condition to narrow the family. Final material, dimensions and compatibility are confirmed from the drawing, sample and qualification plan.
Wafer or substrate size
Slot count, pitch and orientation
Wafer size and batch capacity
Slot datum and cumulative tolerance
SiC grade or coating system
Wafer size and slot specification
Product families in this category
Wafer Carriers
Wafer carriers
Vertical Quartz Wafer Boats
Vertical batch-carrier structures evaluated for coaxiality, accumulated slot error and wafer support geometry.
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Wafer carriers
SiC Wafer Boats
Custom high-temperature carrier development based on confirmed SiC grade, geometry and qualification criteria.
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Organize the inputs for an engineering review.