Process tubes & chambers
Quartz Process Tubes
Inner, outer and assembled quartz tubes with interfaces, branches and sealing surfaces controlled to the drawing.
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Process environment
Process Tubes & Chamber Parts
Tube, chamber, injector and viewing-component candidates for thermal, deposition, epitaxy and chamber-support applications.
Selection guide
Start with equipment module, gas chemistry, temperature, pressure and mating interfaces.
Use the equipment position and process condition to narrow the family. Final material, dimensions and compatibility are confirmed from the drawing, sample and qualification plan.
Inner and outer diameter with wall thickness
Ports, flanges and sealing interfaces
Gas chemistry and flow direction
Port layout and mating interface
Working wavelength and clear aperture
Flatness, parallelism and finish
Product families in this category
Process Tubes & Chamber Parts
Gas-path components
Quartz Gas Delivery & Injectors
Custom tubes, injectors and distribution assemblies developed around port geometry and gas-flow requirements.
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Windows & optical candidates
Quartz Viewing Windows
Chamber viewing and optical-monitoring candidates; wavelength, sealing edge and optical requirements must be confirmed.
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Organize the inputs for an engineering review.