Wafer carriers
Vertical Quartz Wafer Boats
Vertical batch-carrier structures evaluated for coaxiality, accumulated slot error and wafer support geometry.
View detailsWWONIKWuxi · Lianyungang
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Wafer carriersFused quartz
Quartz Wafer Boats
Drawing-based horizontal and custom carriers with slot geometry developed around the substrate and loading method.
Request a feasibility review
Representative family images. Final geometry and revision are confirmed against the customer drawing.
Material direction
Fused quartz
Candidate processes
Thermal processing · Deposition
Equipment areas
Wafer handling · Furnace
Size approach
3 inch · 4 inch · 6 inch · 8 inch · 12 inch · Square / custom
What this family covers
- horizontal boat
- open boat
- slotted carrier
- substrate boat
Define before quotation
- Wafer or substrate size
- Slot count, pitch and orientation
- Furnace type and temperature profile
Engineering route
From identification to customer qualification.
- 01
Identify the part and equipment position
- 02
Review drawing, sample and process conditions
- 03
Agree critical dimensions and acceptance criteria
- 04
Build and qualify before repeat supply
Suitability boundary
This page identifies a candidate product family. It does not state compatibility with a specific tool, process recipe or OEM part number. Final suitability is confirmed against customer-controlled technical inputs.
Technical enquiry FAQ
What should I send first?
A controlled drawing is preferred. If no drawing is available, send the reference part number, clear photos and ask whether sample-based measurement is possible.
Can WONIK confirm compatibility from a photo?
No. A photo can help identify the candidate family, but material grade, dimensions and equipment compatibility require technical confirmation.
What makes a quotation faster?
Include equipment model and module, process, material or grade, quantity, critical tolerances, temperature, pressure or chemistry, cleaning, packaging and acceptance requirements.
