Products/Wafer Carriers/Vertical Quartz Wafer Boats
Wafer carriersFused quartz

Vertical Quartz Wafer Boats

Vertical batch-carrier structures evaluated for coaxiality, accumulated slot error and wafer support geometry.

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Representative WONIK vertical quartz carrier structure — front view
Front
Representative WONIK vertical quartz carrier structure — side view
Side
Representative WONIK vertical quartz carrier structure — detail view
Detail

Representative family images. Final geometry and revision are confirmed against the customer drawing.

Material direction

Fused quartz

Candidate processes

Thermal processing · Deposition

Equipment areas

Wafer handling · Furnace

Size approach

6 inch · 8 inch · 12 inch · Square / custom

What this family covers

  • vertical boat
  • batch carrier
  • cylindrical carrier

Define before quotation

  • Wafer size and batch capacity
  • Slot datum and cumulative tolerance
  • Loading interface and furnace model

Engineering route

From identification to customer qualification.

  1. 01

    Identify the part and equipment position

  2. 02

    Review drawing, sample and process conditions

  3. 03

    Agree critical dimensions and acceptance criteria

  4. 04

    Build and qualify before repeat supply

Suitability boundary

This page identifies a candidate product family. It does not state compatibility with a specific tool, process recipe or OEM part number. Final suitability is confirmed against customer-controlled technical inputs.

Technical enquiry FAQ

What should I send first?

A controlled drawing is preferred. If no drawing is available, send the reference part number, clear photos and ask whether sample-based measurement is possible.

Can WONIK confirm compatibility from a photo?

No. A photo can help identify the candidate family, but material grade, dimensions and equipment compatibility require technical confirmation.

What makes a quotation faster?

Include equipment model and module, process, material or grade, quantity, critical tolerances, temperature, pressure or chemistry, cleaning, packaging and acceptance requirements.